New method for the deposition of thin films on the inner walls of a deep blind hole: Application to semiconductor doping
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Published:2024-04
Issue:
Volume:173
Page:108148
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ISSN:1369-8001
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Container-title:Materials Science in Semiconductor Processing
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language:en
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Short-container-title:Materials Science in Semiconductor Processing
Author:
Maggioni GianluigiORCID,
Bertoldo Stefano,
Carraro Chiara,
Raniero Walter,
Sgarbossa Francesco,
Napolitani Enrico,
De Salvador Davide