An apparatus for sputter coating the inner walls of tubes
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1146588
Reference9 articles.
1. Angular Distribution of Sputtered Material
2. Experiments by radioactive tracer methods on sputtering by rare-gas ions
3. Angular distribution and differential sputtering yields for low-energy light-ion irradiation of polycrystalline nickel and tungsten
4. Untersuchungen zur Festkörperzerstäubung bei schiefwinkligem Ionenbeschuß polykristalliner Metalloberflächen im Energiebereich um 1 keV
5. Tantal als Werkstoff im chemischen Apparatebau
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