Funder
Dutch Technology Foundation
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference48 articles.
1. Tungsten: Properties, Chemistry, Technology of the Elements, Alloys, and Chemical Compounds;Lassner,1999
2. Silicon VLSI Technology: Fundamentals, Practice, and Modeling;Plummer,2000
3. Selective electroless metal deposition for integrated circuit fabrication;Ting;J. Electrochem. Soc.,1989
4. Phase transformation of thin sputter-deposited tungsten films at room temperature;Rossnagel;J. Vac. Sci. Technol. B,2002
5. Atomic Layer Deposition: An Overview
Cited by
16 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献