Effect of deposition temperature on polymorphous silicon thin films by PECVD: Role of hydrogen-Reference-Cited by-同舟云学术

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Effect of deposition temperature on polymorphous silicon thin films by PECVD: Role of hydrogen

Published:2016-01 Issue: Volume:41 Page:390-397
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Hamui L.,Monroy B.M.,Kim K.H.,López-Suárez A.,Santoyo-Salazar J.,López-López M.,Roca i Cabarrocas P.,Santana G.

Funder

DGAPA-UNAM PAPIIT

CONACyT Mexico

SENER-CONACyT

CONACyT

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference44 articles.

1. High-efficiency p-i-n a-Si:H solar cells with low boron cross-contamination prepared in a large-area single-chamber PECVD reactor

2. Amorphous Silicon Single-Junction Thin-Film Solar Cell Exceeding 10%Efficiency by Design Optimization

3. Reversible conductivity changes in discharge‐produced amorphous Si

4. Irreversible light-induced degradation and stabilization of hydrogenated polymorphous silicon solar cells

5. Hydrogen ion motion in amorphous silicon solar cells at elevated temperatures

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2. Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication;International Journal of Precision Engineering and Manufacturing-Green Technology;2024-04-05

3. Recent Progress in Strain-Engineered Stretchable Constructs;International Journal of Precision Engineering and Manufacturing-Green Technology;2023-09-26

4. Improving structural, optical, and electrical properties of μc-Si:H using non-uniform hydrogen dilution treatment on RF-PECVD prepared layers;Materials Science in Semiconductor Processing;2021-07

5. Spectroscopic ellipsometry investigation to study the microstructure evolution in boron-doped amorphous silicon films as a result of hydrogen dilution;SN Applied Sciences;2021-03-24

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