Growth and characterization of Ta-doped Ga2O3 films deposited by magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference29 articles.
1. Growth and characterization of β-Ga2O3 thin films on different substrates;Hao;J. Appl. Phys.,2019
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3. Defect stability and electronic structure of doped β-Ga2O3: a comprehensive ab initio study;Sun;J. Alloys Compd.,2019
4. Highly preferred orientation of Ga2O3 films sputtered on SiC substrates for deep UV photodetector application;Li;Appl. Surf. Sci.,2019
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2. Effects of Ta concentration on microstructure, optical and optoelectronic properties of Ga2O3:Ta films;Vacuum;2024-06
3. High-performance a-Ga2O3 solar-blind photodetectors by pulsed magnetron sputtering deposition;Journal of Vacuum Science & Technology A;2024-03-14
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