1. EUV For HVM: towards an industrialized scanner for HVM NXE3400B performance update;Es;Proc. SPIE,2018
2. Printability and actinic AIMS review of programmed mask blank defects;Verduijn;Proc. SPIE,2017
3. EUVL: Challenges to manufacturing insertion;Wood;J. Photopolym. Sci. Technol.,2017
4. EUV Mask defectivity–a process of increasing control toward HVM;Jonckheere;Adv. Opt. Technol.,2017
5. EUV Mask infrastructure readiness and gaps for TD and HVM;Liang;Proc. SPIE,2015