Reflection type heterodyne grating interferometry for in-plane displacement measurement-Reference-Cited by-同舟云学术

Reflection type heterodyne grating interferometry for in-plane displacement measurement

Published:2008-05 Issue:9 Volume:281 Page:2582-2589
ISSN:0030-4018
Container-title:Optics Communications
language:en
Short-container-title:Optics Communications

Author:

Hsu Cheng-Chih,Wu Chyan-Chyi,Lee Ju-Yi,Chen Hui-Yi,Weng Han-Fu

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Signal Processing Algorithms for Doppler Effect Based Nanometer Positioning Systems

2. High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics

3. Heterodyne interferometric system with subnanometer accuracy for measurement of straightness

4. High-resolution laser linear encoder with numerical error compensation

5. Compact diffractive interferometric displacement sensor in reflection

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