A new spectrometer for grazing incidence X-ray fluorescence for the characterization of Arsenic implants and Hf based high-k layers-Reference-Cited by-同舟云学术

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A new spectrometer for grazing incidence X-ray fluorescence for the characterization of Arsenic implants and Hf based high-k layers

Published:2010-06 Issue:6 Volume:65 Page:429-433
ISSN:0584-8547
Container-title:Spectrochimica Acta Part B: Atomic Spectroscopy
language:en
Short-container-title:Spectrochimica Acta Part B: Atomic Spectroscopy

Author:

Ingerle D.,Meirer F.,Zoeger N.,Pepponi G.,Giubertoni D.,Steinhauser G.,Wobrauschek P.,Streli C.

Publisher

Elsevier BV

Subject

Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference13 articles.

1. Total Reflection X-Ray Fluorescence Analysis;Klockenkämper,1997

2. Glancing-incidence X-ray analysis of thin-layered materials: a review;de Boer;X-Ray Spectrom.,1995

3. Glancing-incidence X-ray fluorescence of layered materials;de Boer;Phys. Rev. B,1991

4. Total reflection X-ray fluorescence spectrometry for quantitative surface and layer analysis;Weisbrod;Appl. Phys. A: Mater. Sci. Process.,1991

5. Metalloid contaminated microhabitats and their biodiversity at a former antimony mining site in Schlaining, Austria;Steinhauser;Open Environ. Sci.,2009

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Laboratory grazing-incidence X-ray fluorescence spectroscopy as an analytical tool for the investigation of sub-nanometer CrSc multilayer water window optics;Spectrochimica Acta Part B: Atomic Spectroscopy;2020-12

2. A mathematical model for deep ion implantation depth profiling by synchrotron radiation grazing-incidence X-ray fluorescence spectrometry;Journal of Analytical Atomic Spectrometry;2020

3. Evaluation of a sample preparation procedure for total-reflection X-ray fluorescence analysis of directly collected airborne particulate matter samples;Spectrochimica Acta Part B: Atomic Spectroscopy;2018-09

4. JGIXA — A software package for the calculation and fitting of grazing incidence X-ray fluorescence and X-ray reflectivity data for the characterization of nanometer-layers and ultra-shallow-implants;Spectrochimica Acta Part B: Atomic Spectroscopy;2016-04

5. Study of annealing-induced interdiffusion in In2O3/Ag/In2O3 structures by a combined X-ray reflectivity and grazing incidence X-ray fluorescence analysis;Spectrochimica Acta Part B: Atomic Spectroscopy;2015-11

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