A mathematical model for deep ion implantation depth profiling by synchrotron radiation grazing-incidence X-ray fluorescence spectrometry-Reference-Cited by-同舟云学术

A mathematical model for deep ion implantation depth profiling by synchrotron radiation grazing-incidence X-ray fluorescence spectrometry

Published:2020 Issue:12 Volume:35 Page:2964-2973
ISSN:0267-9477
Container-title:Journal of Analytical Atomic Spectrometry
language:en
Short-container-title:J. Anal. At. Spectrom.

Author:

Czyzycki Mateusz¹²³⁴⁵^ORCID,Kokkoris Mike⁶⁷⁸⁹,Karydas Andreas-Germanos¹⁰¹¹¹²¹³⁹^ORCID

Affiliation:

1. Karlsruhe Institute of Technology

2. Laboratory for Applications of Synchrotron Radiation

3. Karlsruhe 76131

4. Germany

5. AGH University of Science and Technology

6. National Technical University of Athens

7. Department of Physics

8. Athens 15780

9. Greece

10. N. C. S. R. “Demokritos”

11. Institute of Nuclear and Particle Physics

12. X-ray Fluorescence Analysis Laboratory

13. Athens 15341

Abstract

Grazing-incidence X-ray fluorescence is applied to obtain shallow depth distributions using the X-ray standing wave (XSW). A new XSW-free mathematical model is proposed that allows the quantitative derivation of much deeper depth distributions.

Funder

International Atomic Energy Agency

Publisher

Royal Society of Chemistry (RSC)

Subject

Spectroscopy,Analytical Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2020/JA/D0JA00346H

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