Submicron-resolved X-ray topography using asymmetric-reflection magnifiers
Author:
Publisher
Elsevier BV
Subject
Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
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3. Microscopic observation of Cu damascene interconnect grains using X-ray mcrobeam;Hasegawa;J. Appl. Phys.,2001
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