Anomalies in the lattice parameters and residual stress of coatings made by physical vapor deposition methods
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference31 articles.
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4. Low temperature tempering-induced changes in bulk resistivity, temperature coefficient of resistivity and stress in physically vapor-deposited TiN
5. Electron microscopy study of sputtered NbN films
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2. On the evolution of residual stress at different substrate temperatures in sputter-deposited polycrystalline Mo thin films by x-ray diffraction;Materials Research Express;2014-08-11
3. Residual stress and strains of highly textured ZrN films examined by x-ray diffraction methods;Journal of Physics D: Applied Physics;1998-02-21
4. An XRD study of highly textured HfN films;Thin Solid Films;1997-07
5. X-Ray diffraction investigations of magnetron sputtered TiCN coatings;Surface and Coatings Technology;1995-09
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