Residual stress and strains of highly textured ZrN films examined by x-ray diffraction methods
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/31/i=4/a=002/pdf
Reference31 articles.
1. Stress Determination in Textured Thin Films Using X-Ray Diffraction
2. States of residual stress both in films and in their substrates
3. Internal stress and adherence of titanium nitride coatings
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1. Residual Stress in Cr99Al1 Polycrystalline Thin Films;Acta Physica Polonica A;2018-03
2. Influence of substrate bias on the structure and properties of ZrN films deposited by cathodic vacuum arc;Materials Science and Engineering: A;2007-07
3. Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction;Thin Solid Films;2002-10
4. Influence of Combination of Casimir Force and Residual Stress on the Behaviour of Micro- and Nano-Electromechanical Systems;Chinese Physics Letters;2002-05-28
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