Novel tube-type LTCC transducers with buried heaters and inner interdigitated electrodes as a platform for gas sensing at various high temperatures

Author:

Brandenburg Annica,Kita Jaroslaw,Groß Andrea,Moos Ralf

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference37 articles.

1. N. Taguchi, Gas detective device, US Patent No. 3,631,436 (1970).

2. The tin oxide gas sensors and its applications;Watson;Sensors and Actuators,1984

3. Novel microsystem applications with new techniques in low-temperature co-fires ceramics;Peterson;International Journal of Applied Ceramic Technology,2005

4. Development of LTCC smart channels for integrated chemical, temperature, and flow sensing;Ho;Journal of Microelectronics and Electronic Packaging,2005

5. K.A. Peterson, S.B. Rohde, K.B. Pfeifer, T.S. Turner, Method for producing a tube, US Patent 7,155,812 (2007).

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