Preparation and Test of NH3 Gas Sensor Based on Single-Layer Graphene Film

Abstract

The ammonia sensing properties of single-layer graphene synthesized by chemical vapor deposition (CVD) were studied. The Au interdigitated electrode (IDE) was prepared by microelectromechanical systems (MEMS) technology, and then, the single-layer graphene was transferred to the IDE by wet transfer technology. Raman spectroscopy was used to monitor the quality of graphene films transferred to SiO2/Si substrates. Moreover, the theory of graphene’s adsorption of gases is explained. The results show that gas sensing characteristics such as response/recovery time and response are related to the target gas, gas concentration, test temperature, and so on. In the stability test, the difference between the maximum resistance and the minimum resistance of the device is 1 ohm without ammonia, the change is less than 1% of its initial resistance, and the repeatability is up to 98.58%. Therefore, the sensor prepared with high quality single-layer graphene has good repeatability and stability for ammonia detection.