Theoretical investigation of Lamb wave A0 mode in thin SiC/AlN membranes for sensing application in liquid media

Author:

Caliendo Cinzia

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. Acoustic Wave Sensors: Theory, Design, & Physico-Chemical Applications;Ballantine,1997

2. Properties of Advanced Semiconductor Materials: GaN, AIN, InN, BN, SiC, SiGe;Levinshtein,2001

3. Residual stress characterization of polycrystalline 3c-SiC films on Si(100) deposited from methylsilane;Liu;Journal of Applied Physics,2009

4. Stress control of polycrystalline 3C-SiC films in a large-scale LPCVD reactor using 1,3-disilabutane and dichlorosilane as precursors;Roper;Journal of Micromechanics and Microengineering,2006

5. Theoretical investigation of high velocity, temperature compensated Rayleigh waves along AlN/SiC substrates for high sensitivity mass sensors;Cinzia Caliendo;Applied Physics Letters,2012

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