Numerical Investigation of Quasi-Lamb Modes in C‑Tilted ZnO/SiC Composite Membrane for High Performance Pressure Micro-Sensor
Author:
Publisher
Pleiades Publishing Ltd
Subject
Acoustics and Ultrasonics
Link
http://link.springer.com/content/pdf/10.1134/S1063771019030059.pdf
Reference31 articles.
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3. C. M. Lin, Y. Y. Chen, V. V. Felmetsger, D. G. Senesky, and A. P. Pisano, Adv. Mater. 24, 2722 (2012).
4. I. V. Anisimkin, Acoust. Phys. 50 (2), 115 (2004).
5. E. Verona, V. I. Anisimkin, V. A. Osipenko, and N. V. Voronova, Ultrasonics 76, 227(2017).
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