Thin film YSZ-based limiting current-type oxygen and humidity sensor on thermally oxidized silicon substrates-Reference-Cited by-同舟云学术

Thin film YSZ-based limiting current-type oxygen and humidity sensor on thermally oxidized silicon substrates

Published:2016-11 Issue: Volume:236 Page:499-505
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Akasaka Shunsuke

Funder

Osaka Municipal Technology Research Institute and Kyoto Municipal Institute of Industrial Technology and Culture

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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