Development of silicon microheaters for chemoresistive gas sensors-Reference-Cited by-同舟云学术

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Development of silicon microheaters for chemoresistive gas sensors

Published:1999-03-10 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Brida Sebastiano,Ferrario Lorenza,Giacomozzi Flavio,Giusti Domenico,Guarnieri Vittorio,Margesin Benno,Pignatel Giorgio U.,Soncini Giovanni,Vasil'ev Alexey N.,Verzellesi Giovanni,Zen Mario

Publisher

SPIE

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Detection of gas traces using semiconductor sensors, ion mobility spectrometry, and mass spectrometry;European Journal of Mass Spectrometry;2017-08

2. Thin film YSZ-based limiting current-type oxygen and humidity sensor on thermally oxidized silicon substrates;Sensors and Actuators B: Chemical;2016-11

3. Non-silicon MEMS platforms for gas sensors;Sensors and Actuators B: Chemical;2016-03

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