Author:
Codato S.,Campi R.,Rigo C.,Stano A.
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference20 articles.
1. D. Bertone, R. Campi, R.Y. Fang, M. Meliga, G. Morello, S. Murgia, R. Paoletti, ECOC ‘98, 20–24 September 1998, Madrid, Spain.
2. Etching of InP-based MQW laser structure in a MOCVD reactor by chlorinated compounds
3. Etching of InP by HCl in an OMVPE reactor
4. In-situ etching of InP by a low pressure transient HCI process
5. In situ mesa etching and immediate regrowth in a HVPE reactor for buried heterostructure device fabrication
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