Etching of InP by HCl in an OMVPE reactor
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference5 articles.
1. In situ vapor-etch for InP MOVPE using ethylene dibromide
2. In-situ etching of InP by a low pressure transient HCI process
3. Vapor‐Phase Etching of InP Using Anhydrous HCl and PH 3 Gas
4. R. Bhat, unpublished.
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