In-situ etching of InP by a low pressure transient HCI process
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference15 articles.
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1. Growth kinetics of Ga x In(1−x)P nanowires using triethylgallium as Ga precursor;Nanotechnology;2018-07-19
2. Radial InP/InAsP/InP heterostructure nanowires on patterned Si substrates using self-catalyzed growth for vertical-type optical devices;Applied Physics Letters;2015-01-05
3. Self-catalyzed InP Nanowires on Patterned Si Substrates;MRS Proceedings;2015
4. Position-controlled InP nanowires with 10–100 μm pitches using Au-deposited SiO2/InP patterned substrates;Applied Physics Letters;2014-02-10
5. Solid–liquid–vapor metal-catalyzed etching of lateral and vertical nanopores;Nanotechnology;2013-09-24
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