Growth of epitaxial γ-Al2O3(111) films with smooth surfaces on chemically oxidized Si(111) substrates using an Al–N2O mixed source molecular beam epitaxy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
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1. Improving Epitaxial Growth of γ‐Al2O3 Films via Sc2O3/Y2O3 Oxide Buffers;physica status solidi (a);2024-05-27
2. Interfacial Area between Hetero-Epitaxial γ-Al2 O3 and Silicon;Advanced Materials Interfaces;2017-07-13
3. Effect of thermal annealing on the optical and structural properties of γ-Al2O3 films prepared on MgO substrates by MOCVD;Ceramics International;2016-01
4. Metalorganic chemical vapor deposition of Al2O3 using trimethylaluminum and O2 precursors: Growth mechanism and crystallinity;Journal of Crystal Growth;2014-12
5. Crystalline and electronic structure of epitaxial γ-Al2O3 films;Physica B: Condensed Matter;2013-03
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