Atomic hydrogen cleaning of low-index GaAs surfaces
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference15 articles.
1. Semiconductor substrate cleaning and surface morphology in molecular beam epitaxy
2. Low-Temperature Cleaning of GaAs Substrate by Atomic Hydrogen Irradiation
3. Atomic hydrogen cleaning of InP(100): Electron yield and surface morphology of negative electron affinity activated surfaces
4. Real-Time Observations on the Cleaning Process of Patterned GaAs Substrates
5. Influence of the growth conditions on the ridge morphology during GaAs deposition on GaAs (001) patterned substrates
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