Effect of growth conditions on the GaN thin film by sputtering deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference13 articles.
1. Properties of GaN films deposited on Si(111) by radio-frequency-magnetron sputtering
2. Textured growth of cubic gallium nitride thin films on Si (100) substrates by sputter deposition
3. Stability investigation of cubic GaN films grown by metalorganic chemical vapor deposition on GaAs (001)
4. MBE growth of cubic GaN on GaAs substrates
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2. Optimization of High-Quality Gallium Nitride Thin Films Deposited on Silicon Substrates with an Aluminum Nitride Buffer Layer Through Radio-Frequency Magnetron Sputtering;2023
3. Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources;ACS Omega;2020-10-08
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5. Role of RF power in growth and characterization of RF magnetron sputtering GaN/glass thin film;Emerging Materials Research;2019-09-01
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