Micro-defects in Ge doped Czochralski grown Si crystals
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference30 articles.
1. Semiconductor Industry Association, The International Technology Roadmap for Semiconductors (ITRS), San Jose, CA, 2000.
2. Improvement of the Gate Oxide Integrity by Modifying Crystal Pulling and Its Impact on Device Failures
3. Crystal-Originated Singularities on Si Wafer Surface after SC1 Cleaning
4. High Resolution Structure Imaging of Octahedral Void Defects in As-Grown Czochralski Silicon
5. Observation of Lattice Defects in GaAs and Heat-treated Si Crystals by Infrared Light Scattering Tomography
Cited by 24 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Evaluating cooling tube effects on defect formation and distribution in Czochralski crystal growth;Journal of Materials Science: Materials in Electronics;2024-07
2. Seed Production and Melt Replenishment for the Czochralski Growth of Silicon Germanium;Acta Physica Polonica A;2013-08
3. Effect of Germanium Doping on Thermal Evolution of Neutron Irradiation Induced Defects in Czochralski Si;ECS Transactions;2013-03-08
4. Germanium-doped crystalline silicon: A new substrate for photovoltaic application;Journal of Crystal Growth;2013-01
5. Germanium doping for improved silicon substrates and devices;Journal of Crystal Growth;2011-02
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3