Evaluating cooling tube effects on defect formation and distribution in Czochralski crystal growth
Author:
Funder
National Science and Technology Council
Publisher
Springer Science and Business Media LLC
Link
https://link.springer.com/content/pdf/10.1007/s10854-024-13093-3.pdf
Reference35 articles.
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2. D. Borisov et al., Advanced approach for oxygen transport and crystallization front calculation in Cz silicon crystal growth. J. Cryst. Growth 583, 126493 (2022). https://doi.org/10.1016/j.jcrysgro.2021.126493
3. A.R.A. Dezfoli, Czochralski (CZ) process modification with cooling tube in the response to market Global silicon shortage. J. Cryst. Growth 610, 127170 (2023). https://doi.org/10.1016/j.jcrysgro.2023.127170
4. Y. Mukaiyama, K. Sueoka, Numerical investigation of impact of crystal diameter fluctuations on intrinsic point defects distribution in Si crystal grown by Czochralski method. J. Cryst. Growth 595, 126814 (2022). https://doi.org/10.1016/j.jcrysgro.2022.126814
5. K. Kajiwara et al., Oxygen concentration dependence of as-grown defect formation in nitrogen-doped Czochralski silicon single crystals. J. Cryst. Growth 570, 126236 (2021). https://doi.org/10.1016/j.jcrysgro.2021.126236
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