Author:
Nakahata Takumi,Sugihara Kohei,Abe Yuji,Ozeki Tatsuo
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference14 articles.
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4. Junction capacitance reduction due to self-aligned pocket implantation in elevated source/drain NMOSFETs
5. Low thermal budget surface cleaning after dry etching for selective silicon epitaxial growth
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