Controlled growth of high-quality poly-silicon thin films with huge grains on glass substrates using an excimer laser
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference22 articles.
1. Thin crystalline silicon solar cells
2. Crystalline Si thin-film solar cells: a review
3. Excimer laser crystallization techniques for polysilicon TFTs
4. High Mobility Thin Film Transistors Fabricated on a Plastic Substrate at a Processing Temperature of 110°C
5. Growth of polycrystalline silicon at 470 °C by magnetron sputtering onto a sputtered μc‐hydrogenated silicon seed layer
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1. Fabrication of Large-Grain Thick Polycrystalline Silicon Thin Films via Aluminum-Induced Crystallization for Application in Solar Cells;International Journal of Photoenergy;2013
2. Selected area laser-crystallized polycrystalline silicon thin films by a pulsed Nd:YAG laser with 355 nm wavelength;Journal of Semiconductors;2011-12
3. The Effects of Nanometal-Induced Crystallization on the Electrical Characteristics of Bottom-Gate Poly-Si Thin-Film Transistors;Journal of Nanoscience and Nanotechnology;2011-07-01
4. Characteristics of silicon oxide thin films prepared by sol electrophoretic deposition method using tetraethylorthosilicate as the precursor;Current Applied Physics;2009-03
5. Effect of Al thickness on the Al induced low temperature poly-si film crystallization process;2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems;2009
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