Effect of Al thickness on the Al induced low temperature poly-si film crystallization process-Reference-Cited by-同舟云学术

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Effect of Al thickness on the Al induced low temperature poly-si film crystallization process

Published:2009 Issue: Volume: Page:
ISSN:
Container-title:2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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Author:

Hsiao-Yeh Chu ,Ming-Hang Weng ,Ru-Yuan Yang ,Chien-Wei Huang ,Chia-Hsing Li

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/4982489/5068512/05068662.pdf?arnumber=5068662

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thermokinetic Study of Aluminum-Induced Crystallization of a-Si: The Effect of Al Layer Thickness;Nanomaterials;2023-11-10

2. Investigation of Microcrystalline Silicon Thin Film Fabricated by Magnetron Sputtering and Copper-Induced Crystallization for Photovoltaic Applications;Applied Sciences;2020-09-10

3. Improving the Microstructure and Electrical Properties of Aluminum Induced Polysilicon Thin Films Using Silicon Nitride Capping Layer;Journal of Nanomaterials;2014

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