Influence of the growth conditions on the formation of macro-steps on the growth interface of SiC-Crystals

Author:

Arzig Matthias,Künecke Ulrike,Salamon Michael,Uhlmann Norman,Wellmann Peter J.

Funder

Deutsche Forschungsgemeinschaft

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. In-situ and ex-situ characterizations of PVT-grown 4H-SiC single crystals;Journal of Physics D: Applied Physics;2024-09-03

2. Effect of TCS gas flow and pre-etching on homopitaxial growth of 4H-SiC;RSC Advances;2024

3. Prevention of Bunched Basal Plane Dislocation Arrays in 4H-SiC PVT-Growth;Solid State Phenomena;2023-05-30

4. Effect of Growth Conditions on the Surface Morphology and Defect Density of CS‐PVT‐Grown 3C‐SiC;Crystal Research and Technology;2023-05-17

5. Reduction of threading screw dislocations in 4H-SiC crystals by physical vapor transport growth;2022 19th China International Forum on Solid State Lighting & 2022 8th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS);2023-02-07

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