Phase formation in double oxide films of Hf–La–O system
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference26 articles.
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3. Fabrication and characterization of La-doped HfO2 gate dielectrics by metal-organic chemical vapor deposition;Huang;Applied Surface Science,2010
4. Study of interfacial reactions and phase stabilization of mixed Sc, Dy, Hf high-k oxides by attenuated total reflectance infrared spectroscopy;Hardy;Applied Surface Science,2009
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1. The crystal structure of solid solutions formed in the HfO2-Sc2O3 nanoscale system;Journal of Crystal Growth;2019-10
2. Phase composition of nanosized oxide film structures based on lanthanum and scandium doped HfO2;Journal of Structural Chemistry;2017-12
3. Advances in Deposition of Transition-Metal Oxides from Metal Enolates;PATAI'S Chemistry of Functional Groups;2016-06-21
4. Structure, chemistry and luminescence properties of dielectric La Hf1-O films;Materials Chemistry and Physics;2016-06
5. Impact of lanthanum on the modification of HfO2 films structure;Journal of Rare Earths;2015-08
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