A numerical study on heat transfer and film growth rate of InP and GaAs MOCVD process
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference13 articles.
1. Transport phenomena and chemical reaction issues in OMVPE of compound semiconductors
2. Kinetic studies on thermal decomposition of MOVPE sources using fourier transform infrared spectroscopy
3. Kinetics of GaAs Metalorganic Chemical Vapor Deposition Studied by Numerical Analysis Based on Experimental Reaction Data
4. MOCVD of InGaAsP, InGaAs and InGaP over InP and GaAs substrates: distribution of composition and growth rate in a horizontal reactor
5. Fundamental kinetics determining growth rate profiles of InP and GaAs in MOCVD with horizontal reactor
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