Investigation of transport processes in a commercial hot wall CVD reactor with multi-substrates for high-quality pyrocarbon deposition-Reference-Cited by-同舟云学术

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Investigation of transport processes in a commercial hot wall CVD reactor with multi-substrates for high-quality pyrocarbon deposition

Published:2021-11 Issue: Volume:425 Page:127685
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Shinde Vijay M.,Deivendran Balamurugan,Kumar Harish,Eswara Prasad N.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference52 articles.

1. Low temperature pyrocarbons: a review;Bourrat;J. Braz. Chem. Soc.,2006

2. Deposition of pyrolytic carbon in porous solid;Kotlensky,1973

3. Characterization of the anisotropy of pyrolytic carbon by Raman spectroscopy;López-Honorato;Carbon,2010

4. CVD and CVI of pyrocarbon from various precursors;Vignoles;Surf. Coat. Technol.,2004

5. Chemical vapour deposition and infiltration processes of carbon materials;Delhaes;Carbon,2002

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