A cost-effective approach for transitioning to larger wafer production by small Czochralski pullers
Author:
Funder
National Science and Technology Council
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference31 articles.
1. Measuring and interpreting the lifetime of silicon wafers;Cuevas;Sol. Energy,2004
2. Silicon wafer bonding mechanism for silicon-on-insulator structures;Abe;Jpn. J. Appl. Phys.,1990
3. Heterogeneous wafer bonding technology and thin-film transfer technology-enabling platform for the next generation applications beyond 5G;Ren;Micromachines,2021
4. W. Rachmady et al., 300mm heterogeneous 3D integration of record performance layer transfer germanium PMOS with silicon NMOS for low power high performance logic applications, in: 2019 IEEE International Electron Devices Meeting (IEDM), IEEE, 2019, pp. 29.7.1–29.7.4.
5. U. Peralagu et al., CMOS-compatible GaN-based devices on 200mm-Si for RF applications: Integration and Performance, in: 2019 IEEE International Electron Devices Meeting (IEDM), IEEE, 2019, pp. 17.2.1–17.2.4.
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