Author:
Liu H.Y.,Tang G.S.,Zeng F.,Pan F.
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference27 articles.
1. Nitride Semiconductors and Devices;Morkoc,1999
2. Low-temperature plasma-assisted growth of optically transparent, highly oriented nanocrystalline AlN;Mirpuri;Journal of Applied Physics,2007
3. Degradation of the piezoelectric response of sputtered c-axis AlN thin films with traces of non-(0002) X-ray diffraction peaks;Sanz-Hervas;Applied Physics Letters,2006
4. Structural, optical, and acoustic characterization of high-quality AlN thick films sputtered on Al2O3 (0001) at low temperature for GHz-band electroacoustic devices applications;Caliendo;J. Appl. Phys.,2004
5. R. Lanz, P. Muralt, Solidly mounted BAW filters for 8GHz based on AlN thin films, in: D.E. Yuhas, S.C. Schneider (Eds.), IEEE Ultrasonics Symposium Proceedings, 2003, pp. 178–181
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