High growth rate MOVPE of Al(Ga)N in planetary reactor

Author:

Lundin W.V.,Nikolaev A.E.,Yagovkina M.A.,Brunkov P.N.,Rozhavskaya M.M.,Ber B.Ya.,Kazantsev D.Yu.,Tsatsulnikov A.F.,Lobanova A.V.,Talalaev R.A.

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference21 articles.

1. Multilayer AlN/AlGaN/GaN/AlGaN heterostructures for high-power field-effect transistors grown by ammonia MBE on silicon substrates

2. Improved Efficiency of 255–280 nm AlGaN-Based Light-Emitting Diodes

3. Dependence of the growth rate of an AlN layer on nitrogen pressure in a reactor for sublimation growth of AlN crystals

4. T.Yu. Chemekova, O.V. Avdeev, S.S. Nagalyuk, E.N. Mokhov, Yu.N. Makarov in: Proceedings of the Abstracts of the 5th All-Russia Conference on Gallium, Indium, and Aluminum Nitrides: Structures and Devices, Moscow, 2010, p. 25.

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1. Study of AlN growth using AMEC Prismo HiT3 MOCVD reactor;Journal of Crystal Growth;2024-01

2. Influence of inlet structures of planetary reactor on gas reaction path in AlN-MOVPE process;Journal of Crystal Growth;2021-01

3. Progress in Modeling of III-Nitride MOVPE;Progress in Crystal Growth and Characterization of Materials;2020-08

4. Review—Review of Research on AlGaN MOCVD Growth;ECS Journal of Solid State Science and Technology;2020-01-22

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