Nonlinear model-based control of the Czochralski process II: Reconstruction of crystal radius and growth rate from the weighing signal-Reference-Cited by-同舟云学术

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Nonlinear model-based control of the Czochralski process II: Reconstruction of crystal radius and growth rate from the weighing signal

Published:2010-03 Issue:7 Volume:312 Page:1019-1028
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Winkler J.,Neubert M.,Rudolph J.

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference38 articles.

1. The basis of automatic diameter control utilizing bright ring meniscus reflections;Digges;J. Cryst. Growth,1975

2. Automatic diameter control of Czochralski crystals;Patzner;Solid State Technol.,1967

3. Automatic crystal pulling with optical diameter control using a laser beam;Gross;J. Cryst. Growth,1972

4. An overview of silicon crystal growth processes;Lorenzini;Solid State Technol.,1974

5. J. Levinson, Temperature control for crystal pulling, US Patent No. 2,908,004, October 6, 1959.

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