Effects of the electric bias on the deposition behavior of silicon films on glass during hot-wire chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference20 articles.
1. Status of Cat-CVD (Hot Wire CVD) research in the United States
2. Status of Cat-CVD (Hot-Wire CVD) research in Europe
3. Present status of micro- and polycrystalline silicon solar cells made by hot-wire chemical vapor deposition
4. Device grade hydrogenated polymorphous silicon deposited at high rates
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1. Bias Effect on Deposition Behaviour of Charged Nanoparticles;Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes;2016
2. Microcrystalline silicon films fabricated by bias-assisted hot-wire chemical vapor deposition;Journal of Materials Science: Materials in Electronics;2013-08-21
3. Real time measurements of charged gas phase nuclei during the deposition of silicon thin films by hot wire chemical vapor deposition;Current Applied Physics;2013-07
4. Improvement of the Crystallinity of Silicon Films Deposited by Hot-Wire Chemical Vapor Deposition with Negative Substrate Bias;Journal of Electronic Materials;2013-05-25
5. In-SituMeasurements of Charged Nanoparticles Generated During Hot Wire Chemical Vapor Deposition of Silicon Using Particle Beam Mass Spectrometer;Aerosol Science and Technology;2013-01
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