Real time measurements of charged gas phase nuclei during the deposition of silicon thin films by hot wire chemical vapor deposition-Reference-Cited by-同舟云学术

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Real time measurements of charged gas phase nuclei during the deposition of silicon thin films by hot wire chemical vapor deposition

Published:2013-07 Issue: Volume:13 Page:S45-S49
ISSN:1567-1739
Container-title:Current Applied Physics
language:en
Short-container-title:Current Applied Physics

Author:

Hong Ju-Seop,Kim Chan-Soo,Yoo Seung-Wan,Park Seong-Han,Lee Sung-Soo,Hwang Nong-Moon,Choi Hoo-Mi,Kim Dong-Bin,Kim Tae-Sung

Publisher

Elsevier BV

Subject

General Physics and Astronomy,General Materials Science

Reference28 articles.

1. Area laser crystallized LTPS TFTs with implanted contacts for active matrix OLED displays

2. Review on nanostructured semiconductors for dye sensitized solar cells

3. High performance poly-Si thin film transistors fabricated by self-aligned seed induced lateral crystallization

4. High-deposition rate a-Si:H n–i–p solar cells grown by HWCVD

5. Microcrystalline silicon for solar cells deposited at high rates by hot-wire CVD

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Low temperature deposition of polycrystalline silicon thin films on a flexible polymer substrate by hot wire chemical vapor deposition;Journal of Crystal Growth;2016-11

2. Experimental Confirmation of Charged Nanoparticles at Low Pressure;Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes;2016

3. Nonclassical Crystallization in Low-Temperature Deposition of Crystalline Silicon by Hot-Wire Chemical Vapor Deposition;Crystal Growth & Design;2014-11-10

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