Nonclassical Crystallization in Low-Temperature Deposition of Crystalline Silicon by Hot-Wire Chemical Vapor Deposition

Author:

Yoo Seung-Wan1,Hong Ju-Seop1,Lee Sung-Soo1,Kim Chan-Soo2,Kim Tae-Sung3,Hwang Nong-Moon1

Affiliation:

1. Department of Materials Science & Engineering, Seoul National University, Daehak-dong, Gwanak-gu, Seoul 151-744, Republic of Korea

2. Marine Energy Convergence & Integration Laboratory, JGRC of Korea Institute of Energy Research, Gimnyeong-ri, Gujwa-eup, Jeju-si, Jeju-do 695-971, Republic of Korea

3. Department of Mechanical Engineering, Sungkyunkwan University, 300 Cheoncheon-dong, Jangan-gu, Suwon, Gyunggi-do 440-746, Republic of Korea

Funder

National Research Foundation of Korea

Publisher

American Chemical Society (ACS)

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

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