Low temperature deposition of polycrystalline silicon thin films on a flexible polymer substrate by hot wire chemical vapor deposition-Reference-Cited by-同舟云学术

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Low temperature deposition of polycrystalline silicon thin films on a flexible polymer substrate by hot wire chemical vapor deposition

Published:2016-11 Issue: Volume:453 Page:151-157
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Lee Sang-hoon,Jung Jae-soo,Lee Sung-soo,Lee Sung-bo,Hwang Nong-moon

Funder

National Research Foundation of Korea

Ministry of Science, ICT & Future Planning

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference69 articles.

1. Area laser crystallized LTPS TFTs with implanted contacts for active matrix OLED displays;Persidis;Solid State Electron.,2008

2. Low temperature poly-Si TFT-LCD by excimer laser anneal;Uchikoga;Thin Solid Films,2001

3. Photovoltaic technology: the case for thin-film solar cells;Shah;Science,1999

4. Fracture toughness of polysilicon MEMS devices;Kahn;Sens. Actuators A: Phys.,2000

5. High-perfirmance flexible thin-film transistor fabricated using print-transferrable polycrystalline silicon membranes on a plastic substrate;Qin;Semicond. Sci. Technol.,2011

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2. Investigation of effective stress imposed on flexible single-crystalline semiconductor nanomembrane electronics under bending conditions;Modern Physics Letters B;2022-05-20

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4. Transfer of an ultrathin single-crystal silicon film from a silicon-on-insulator to a polymer;Materials Today Nano;2021-03

5. Structural and Electronic Properties of Polycrystalline InAs Thin Films Deposited on Silicon Dioxide and Glass at Temperatures below 500 °C;Crystals;2021-02-05

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