Monte Carlo simulation of gas transport in a TiN reactive sputtering apparatus for large area deposition
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference7 articles.
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1. FEA Analysis of Zirconium Nitride Coatings Prepared by RF Magnetron Sputtering: CFD Approach;Materials Today: Proceedings;2018
2. CFD Analysis of Sputtered TiN Coating;Materials Today: Proceedings;2017
3. Oxygen Incorporation in Reactive-Sputter-Deposited TiN Films: Influence of the Metal to O2 Gas Flux Ratio;Journal of the Vacuum Society of Japan;2014
4. Modeling of Vapor-Phase Processes;Fundamentals of Modeling for Metals Processing;2009-12-01
5. Computer simulation of magnetron sputtering — Experience from the industry;Surface and Coatings Technology;2007-12
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