CFD Analysis of Sputtered TiN Coating
Author:
Publisher
Elsevier BV
Subject
General Medicine
Reference10 articles.
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2. P. M. Martin, “Handbook of Deposition Technologies for Films and Coatings (Third Edition)”ISBN: 978-0-8155-2031-3.
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4. Micro-tribo-mechanical properties of nanocrystalline TiN thin films for small scale device applications
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