Micro-tribo-mechanical properties of nanocrystalline TiN thin films for small scale device applications-Reference-Cited by-同舟云学术

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Micro-tribo-mechanical properties of nanocrystalline TiN thin films for small scale device applications

Published:2015-08 Issue: Volume:88 Page:25-30
ISSN:0301-679X
Container-title:Tribology International
language:en
Short-container-title:Tribology International

Author:

Kumar D. Dinesh,Kumar N.,Kalaiselvam S.,Dash S.,Jayavel R.

Funder

CSIR, Government of India

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials

Reference32 articles.

1. Scale dependence of micro/nano-friction and adhesion of MEMS/NEMS materials, coatings and lubricants;Nikhil;Nanotechnology,2004

2. Micro/nanotribological studies of polysilicon and SiC films for MEMS applications;Sriram;Wear,1998

3. Ultrathin TiN membranes as a technology platform for CMOS-integrated MEMS and BioMEMS devices;Birkholz;Adv Funct Mater,2011

4. Single-crystal-silicon-based microinstrument to study friction and wear at MEMS sidewall interfaces;Ansari;J Micromech Microeng,2012

5. Diamond and diamond-like carbon MEMS;Luo;J Micromech Microeng,2007

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1. Influence of topography on nano-mechanical properties of cylindrical magnetron sputtered TiN films;Surface Topography: Metrology and Properties;2024-07-31

2. Influence of Interfacial Tribo-Chemical and Mechanical Effect on Tribological Behaviors of TiN Film in Different Environments;Processes;2024-04-30

3. On the Mechanical Properties of Ultrathin Titanium Nitride Films Under Different Gas Ratios of Pvd Process;2024

4. Phase Engineering of Titanium Oxynitride System and Its Solar Light-Driven Photocatalytic Dye Degradation, H₂ Generation, and N₂ Fixation Properties;ACS Sustainable Chemistry & Engineering;2023-10-07

5. The influence of Ni on the composition, structure and properties of Ti-Cr-N coatings;Powder Metallurgy аnd Functional Coatings;2023-03-15

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