Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices-Reference-Cited by-同舟云学术

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Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices

Published:2011-03-25 Issue:9 Volume:21 Page:1652-1656
ISSN:1616-301X
Container-title:Advanced Functional Materials
language:en
Short-container-title:Adv. Funct. Mater.

Author:

Birkholz M.,Ehwald K.-E.,Kulse P.,Drews J.,Fröhlich M.,Haak U.,Kaynak M.,Matthus E.,Schulz K.,Wolansky D.

Publisher

Wiley

Subject

Electrochemistry,Condensed Matter Physics,Biomaterials,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. http://www.itrs.net/Links/2009ITRS/2009Chapters_2009Tables/2009_ExecSum.pdf 2009

2. An industrial and applied review of new MEMS devices features

3. BioMEMS: state-of-the-art in detection, opportunities and prospects

4. A BioMEMS Review: MEMS Technology for Physiologically Integrated Devices

5. Self-assembled microdevices driven by muscle

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