Pressure control system for vacuum MEMS-Reference-Cited by-同舟云学术

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Pressure control system for vacuum MEMS

Published:2020-08 Issue: Volume:178 Page:109452
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Grzebyk Tomasz^ORCID,Turczyk Krzysztof,Szyszka Piotr,Górecka-Drzazga Anna,Dziuban Jan

Funder

National Centre for Research and Development

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference33 articles.

1. Miniature mass spectrometer integrated on a chip;Szyszka,2017

2. Gas analysis using a MEMS linear time-of-flight mass spectrometer;Vigne;Int. J. Mass Spectrom.,2017

3. MEMS mass spectrometers: the next wave of miniaturization;Syms;J. Micromech. Microeng.,2016

4. Miniature and fieldable mass spectrometers: recent advances;Snyder;Anal. Chem.,2016

5. Vacuum Microelectronics,2001

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Lateral Glow Discharge Ion Source for the Integrated MEMS Quadrupole Mass Spectrometer;2024 37th International Vacuum Nanoelectronics Conference (IVNC);2024-07-15

2. Recent Advances in Bio-MEMS and Future Possibilities: An Overview;Journal of The Institution of Engineers (India): Series B;2023-10-04

3. Review and prospect on portable mass spectrometer for recent applications;Vacuum;2022-05

4. Microelectromechanical Systems (MEMS) for Biomedical Applications;Micromachines;2022-01-22

5. Recent advances in MEMS mass spectrometers;Chinese Journal of Analytical Chemistry;2022-01

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