Effect of temperature on microstructure and electrical properties of TaSi2 thin films grown on Si substrates
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference26 articles.
1. Silicide for VLSI applications;Murarka,1983
2. Industrielle Anorganische Chemie;Bucher,1984
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