AlGaN surfaces etched by CF4 plasma with and without the assistance of near-ultraviolet irradiation
Author:
Funder
JSPS KAKENHI
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference39 articles.
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1. Effects of air-based nonequilibrium atmospheric pressure plasma jet treatment on characteristics of polypropylene film surfaces;Applied Surface Science;2020-04
2. Effects of ultraviolet wavelength and intensity on AlGaN thin film surfaces irradiated simultaneously with CF4 plasma and ultraviolet;Vacuum;2019-01
3. Stability, electronic and vibrational properties of GaAlN wurtzoid molecules and nanocrystals: A DFT study;Vacuum;2018-07
4. Characteristics of N2and O2Plasma-Induced Damages on AlGaN Thin Film Surfaces;physica status solidi (a);2017-09-05
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