Reactive sputtering of SiO2–TiO2 thin film from composite Six/TiO2 targets
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference12 articles.
1. Characterization of SiO2 and TiO2 films prepared using rf magnetron sputtering and their application to anti-reflection coating;Jeong;Vacuum,2004
2. Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating;Janicki;Optical Society of America,2006
3. Review – fundamental understanding and modelling of reactive sputtering processes;Nyberg;Thin Solid Films,2005
4. In situ diagnostic studies of reactive co-sputtering from means of soft X-ray and optical emission spectroscopy;Nyberg;Journal of Vacuum Science Technology,1997
5. On the high rate reactive sputtering of substoichiometric titanium oxide targets;Kubart;Applied Physics Letters,2008
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Design of metastable complex-concentrated alloys through composition tailoring;Materials & Design;2022-12
2. Synthesis of high-entropy alloy thin films via grain boundary diffusion–assisted solid-state alloying;Scripta Materialia;2022-01
3. Layered Si–Ti oxide thin films with tailored electrical and optical properties by catalytic tandem MLD-ALD;RSC Advances;2021
4. Silicon Based Target Materials for Large Area Sputtering Applications;59th Annual Technical Conference Proceedings;2016
5. Sol-gel synthesis of xTiO2(100 −x)SiO2 nanocomposite thin films: Structure, optical and antireflection properties;Thin Solid Films;2014-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3