Layered Si–Ti oxide thin films with tailored electrical and optical properties by catalytic tandem MLD-ALD-Reference-Cited by-同舟云学术

Layered Si–Ti oxide thin films with tailored electrical and optical properties by catalytic tandem MLD-ALD

Published:2021 Issue:56 Volume:11 Page:35099-35109
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Kalderon Boaz¹,Sarkar Debabrata²^ORCID,Killi Krushnamurty¹,Danzig Tamuz³,Azulay Doron³,Millo Oded³^ORCID,Cohen-Taguri Gili⁴,Yerushalmi Roie¹^ORCID

Affiliation:

1. Institute of Chemistry, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Edmond J. Safra Campus, Givat Ram, Jerusalem, 91904, Israel

2. Applied NanoPhysics Laboratory, Department of Physics and Nanotechnology, SRM Institute of Science and Technology, Kattankulathur, 603203, India

3. Racah Institute of Physics, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, J. Safra Campus, Givat Ram, Jerusalem, 91904, Israel

4. Bar-Ilan Institute for Nanotechnology and Advanced Materials, Ramat-Gan 52900, Israel

Abstract

Layer-by-layer deposition of Si–Ti layered oxide thin films are obtained using catalytic tandem M/ALD methodology. The films exhibit optical (RI) and electrical conductivities by selecting the MLD to ALD proportion in the super cycle.

Funder

Israel Science Foundation

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2021/RA/D1RA06764H

Reference48 articles.

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3. Design and preparation of superhydrophobic, broadband and double-layer antireflective coatings

4. Relationship between photocatalytic activity, hydrophilicity and self-cleaning effect of TiO2/SiO2 films

5. A Comprehensive Review of Glucose Biosensors Based on Nanostructured Metal-Oxides

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